Sorry I've taken so long to reply.I hope we can stay friends just like old times.
I'm so Sorry for my belated reply.Can we make peace?
Please forgive me for taking so long to reply.I beg your pardon,I didn't meant to upset you.
I sincerely apologize for the delay in response.Please stop feeling angry with me and keep loving me.
Please, Forgive the dilatory nature of my reply.
"Sorry for the delayed response. I've seen your mail/message but couldn't respond earlier due to XYZ reason."
I apologize for taking so long in responding to your e-mail/message. Anyway I am glad to hear you are OK.
I hope you're doing well. Thank you for your patience while I was working on .... I sincerely apologize for the delay in response.
Hi {Name}
I hope you're having a good week/day. Firstly, I'd like to apologize for the delay in response. Thank you for your patience all this while.